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Microelectromechanical systems design and modeling Materials Microfabrication processes Simulation Microactuators: Design and Technology Considerations in mechanisms selection Electrostatic systems Electrothermal systems Piezoelectric systems Microreaction chambers Basics of microfluidics Components of a microfluidic system Reaction chambers Conclusions Dynamic behavior of smart microelectromechanical systems in industrial applications Resonant frequency response of smart microelectromechanical systems vibrating structures Quality factor and the loss coefficient of smart microelectromechanical systems vibrating structures Industrial applications Microelectromechanical systems integrating motion and displacement sensors Microelectromechanical systems gyroscope Microelectromechanical systems magnetometer Conclusion and future trends Microelectromechanical systems print heads for industrial printing Electrohydrodynamic print head droplet ejection Electrohydrodynamic smart printing system Case study: electrohydrodynamic printing applications Photovoltaic and fuel cells in power microelectromechanical systems for smart energy management Photovoltaic mini-generators Applications of photovoltaic mini-generators Microfuel cells Applications of microfuel cells Smart energy management with sun sensors Smart acoustic sensor array system for real-time sound processing applications Microelectromechanical systems microphones Fundamentals of acoustic sensor arrays and applications Design and implementation of smart acoustic microelectromechanical systems array Smart acoustic sensor array system operation Smart acoustic sensor array system calibration Sensor array for time-of-flight measurements Smart acoustic sensor array system for mapping of the heart sound These devices can be used in IMUs inertial measurement units , platform stabilization systems, inclinometers, and predictive maintenance systems.

These mid to high range sensors have been engineered for some of the most demanding sensor applications, such as seismic mapping and industrial and infrastructure predictive maintenance systems.

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For condition monitoring and structural health monitoring, the measurement range is an important parameter. For example, in applications where acceleration peaks are in the order of a few g s, a 2 g range sensor is sufficient.

Micro-electro-mechanical systems (MEMS) sensors

However, these devices are often operated in environments where they are subject to strong vibrations and shocks that would lead to sensor saturation. Once saturated, it is no longer possible to measure the correct acceleration. As a result, data is lost until the device can recover nominal operation.

Smart Home using Microelectromechanical Systems (MEMS) Sensor and Ambient Intelligences (SAHOMASI)

In this case, a 40 g sensor could be used. It is less likely to reach saturation, and even in the presence of high mechanical noise, it is possible to extract the required information with the proper signal processing.

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Because sensors in many infrastructure applications can be remote or difficult to access, wireless sensor networks are the best solution. This makes low power consumption another key consideration. When the memory is full, an interrupt wakes up the microcontroller to transfer data and perform the requested actions.

Once the microcontroller has completed the transfer, it returns to low power sleep mode, ensuring a very low level of power consumption. Typically, low power consumption comes at the expense of other factors, such as speed and noise. In addition, the internal architecture helps to optimize the sensitivity of the accelerometer.

Figure 2 shows the block diagram of the analog and digital devices.

Smart Mems and Sensor Systems

The signal coming from the sensor goes into a filtering block before being processed by the subsequent stages. The digital devices have an additional programmable digital filter.

The cutoff frequency of the lowpass filter is adjusted on the basis of the output data rate, and it is also possible to insert a high-pass filter to realize a band-pass function. For condition monitoring, the spectral analysis of vibrations is the main tool, so high bandwidth is important to capture the higher number of harmonics. The frequency of the mechanical resonance of the sensor is around 5.

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Burdess J. This paper describes a procedure for identifying and correcting anisoinertia and anisoelasticity present in a micro-ring gyroscope.

Smart MEMS and Sensor Systems

The major disadvantages of popular tuning methods such as mass trimming using laser ablation or focussed ion beam [ Husak M. The paper describes conceptual approach to the design of a tilt structure determined for integration on a chip. An accelerometer for measurement of inclination in x and y axes is used as a sensor. There [ Daniel M. Proper CAD design of electronic microsystems oriented for environment monitoring requires accurate models of various sensors, which would be compatible with the existing behavioral simulators.